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Microstructure evolution of hydrogen-implanted silicon during the annealing process
Jing Wang, Qinghua Xiao, Hailing Tu, Beiling Shao, Ansheng LiuVolume:
66
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(02)00924-3
File:
PDF, 795 KB
english, 2003