In-situ end point detection of the STI-CMP process using a high selectivity slurry
Sang-Yong Kim, Kyoung-Jin Lee, Yong-Jin SeoVolume:
66
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(02)00929-2
File:
PDF, 364 KB
english, 2003