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Electrical properties of Si/SiO2/Si structures produced by direct bonding of pre-oxidized silicon wafers
A. Fedotov, Anis M.H. Saad, K. Enisherlova, A. Mazanik, B.G. Gorachev, E.M. TemperVolume:
66
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(02)00938-3
File:
PDF, 331 KB
english, 2003