Characterization of (Ba,Sr)TiO3 thin-film capacitors with...

Microelectronic Engineering 2003 Vol. 66; Iss. 1-4

Characterization of (Ba,Sr)TiO3 thin-film capacitors with Ir bottom electrodes and its improvement by plasma treatment

Dong-Sing Wuu, Ray-Hua Horng, Chin-Ching Lin, Yan-Hong Liu
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Volume:
66
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(02)00971-1
File:
PDF, 220 KB
english, 2003
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