Electrical properties of Al2O3 gate dielectrics

Changhai Lin, Jinfeng Kang, Dedong Han, Dayu Tian, Wei Wang, Jinghua Zhang, Meng Liu, Xiaoyan Liu, Ruqi Han

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Volume:

Year:

2003

Language:

english

Pages:

DOI:

10.1016/s0167-9317(02)01007-9

File:

PDF, 119 KB

english, 2003

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