Rapid deep micromachining of polytetrafluoroethylene by MeV...

Journal of Micromechanics and Microengineering 2005 / 04 Vol. 15; Iss. 4

Rapid deep micromachining of polytetrafluoroethylene by MeV ion bombardment in oxygen-rich atmospheres

Gomez-Morilla, I, Sofield, C J, Grime, G W, Gwilliam, R
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/4/004
Date:
April, 2005
File:
PDF, 673 KB
english, 2005
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