Crystallization and disappearance of defects of the...

Microelectronic Engineering 2003 Vol. 66; Iss. 1-4

Crystallization and disappearance of defects of the annealed silicon nanowires

Junjie Niu, Jian Sha, Youwen Wang, Xiangyang Ma, Deren Yang
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Volume:
66
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(03)00026-1
File:
PDF, 196 KB
english, 2003
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