Investigation into the patterning of a concave-type Pt electrode capacitor using the reactive ion etching method
Hyoun Woo Kim, Byong-Sun Ju, Chang-Jin KangVolume:
65
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(03)00178-3
File:
PDF, 1.01 MB
english, 2003