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Thermal response of MOCVD hafnium silicate
Patrick Lysaght, Brendan Foran, Susanne Stemmer, Gennadi Bersuker, Joe Bennett, Robin Tichy, Larry Larson, Howard R HuffVolume:
69
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(03)00295-8
File:
PDF, 741 KB
english, 2003