Thermal response of MOCVD hafnium silicate

Patrick Lysaght, Brendan Foran, Susanne Stemmer, Gennadi Bersuker, Joe Bennett, Robin Tichy, Larry Larson, Howard R Huff

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Volume:

Year:

2003

Language:

english

Pages:

DOI:

10.1016/s0167-9317(03)00295-8

File:

PDF, 741 KB

english, 2003

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