Formation of Boron-Based Films and Boron Nitride Layers by CVD of a Boron Ester
Priv.-Doz. Dr. Hermann Sachdev, Dr. Frank Müller, Prof. Dr. Stefan HüfnerVolume:
123
Year:
2011
Language:
english
Pages:
5
DOI:
10.1002/ange.201003012
File:
PDF, 582 KB
english, 2011