SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - Microfabrication of capillary columns on silicon
Wiranto, Goib, Samaan, Noel D., Mulcahy, Dennis E., Davey, David E., Hariz, Alex, Varadan, Vijay K., Reinhold, OlafVolume:
3242
Year:
1997
Language:
english
DOI:
10.1117/12.293567
File:
PDF, 482 KB
english, 1997