Protrusion Formation on Metal Targets during Co-Sputtering

Japanese Journal of Applied Physics 1972 / 10 Vol. 11; Iss. 10

Protrusion Formation on Metal Targets during Co-Sputtering

Oohashi, Takashi, Yamanaka, Shun'ichi
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Volume:
11
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.11.1581
Date:
October, 1972
File:
PDF, 289 KB
english, 1972
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