Low Temperature Synthesis of Silicon Nitride Solid Solution

Low Temperature Synthesis of Silicon Nitride Solid Solution

Masaki, Hideyuki, Oyama, Yoichi, Kamigaito, Osami
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Volume:
14
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.14.301
Date:
February, 1975
File:
PDF, 329 KB
english, 1975
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