Mechanical strength of 300 mm diameter silicon wafers at high temperatures: modeling and simulation
A. Fischer, Th. Grabolla, H. Richter, G. Obermeier, P. Krottenthaler, R. WahlichVolume:
45
Year:
1999
Language:
english
Pages:
15
DOI:
10.1016/s0167-9317(99)00155-0
File:
PDF, 1.36 MB
english, 1999