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Formation of Embedded Monocrystalline NiSi 2 Grid Layers in Silicon by MBE
Ishizaka, Akitoshi, Shiraki, YasuhiroVolume:
23
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L499
Date:
July, 1984
File:
PDF, 519 KB
english, 1984