Properties of Hydro-Fluorinated Amorphous Silicon-Carbide...

Japanese Journal of Applied Physics 1985 / 10 Vol. 24; Iss. Part 1, No

Properties of Hydro-Fluorinated Amorphous Silicon-Carbide Produced by Intermediate Species SiF 2

Uesugi, Takashi, Ihara, Hisanori, Matsumura, Hideki
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1263
Date:
October, 1985
File:
PDF, 96 KB
english, 1985
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