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Changes of Volume and Surface Compositions of Polymethylmethacrylate under Electron Beam Irradiation in Lithography
Samoto, Norihiko, Shimizu, Ryuichi, Hashimoto, HatsujiroVolume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.482
Date:
April, 1985
File:
PDF, 1.26 MB
english, 1985