Water-Soluble Barrier Material for Three-Layer Resist...

Japanese Journal of Applied Physics 1985 / 10 Vol. 24; Iss. Part 2, No

Water-Soluble Barrier Material for Three-Layer Resist Systems

Namatsu, Hideo, Shibata, Toshitaka
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Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.L789
Date:
October, 1985
File:
PDF, 2.29 MB
english, 1985
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