Light-Induced Effect of a-Si Films Fabricated Using the...

Japanese Journal of Applied Physics 1987 / 9 Vol. 26; Iss. Part 1, No

Light-Induced Effect of a-Si Films Fabricated Using the Super Chamber

Ohnishi, Michitoshi, Tsuda, Shinya, Takahama, Tsuyoshi, Isomura, Masao, Nakashima, Yukio, Nakamura, Noboru, Nakano, Shoichi, Yazaki, Takehito, Kuwano, Yukinori
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Volume:
26
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.26.1408
Date:
September, 1987
File:
PDF, 1.58 MB
english, 1987
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