Computer Aided Proximity Effect Correction System in...

Japanese Journal of Applied Physics 1989 / 10 Vol. 28; Iss. Part 1, No

Computer Aided Proximity Effect Correction System in Photolithography

Hirai, Yoshihiko, Nomura, Noboru, Misaka, Akio, Hayama, Shigeru, Yamashita, Kazuhiro, Harafuji, Kenji
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Volume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.2049
Date:
October, 1989
File:
PDF, 257 KB
1989
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