Fabrication of Storage Capacitance-Enhanced Capacitors with...

Fabrication of Storage Capacitance-Enhanced Capacitors with a Rough Electrode

Hayashide, Yoshio, Miyatake, Hiroshi, Mitsuhashi, Junichi, Hirayama, Makoto, Higaki, Takashi, Abe, Haruhiko
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L2345
Date:
December, 1990
File:
PDF, 1.33 MB
english, 1990
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