Comparison of Silica- and Alumina-Based Spin-on Sources for...

Japanese Journal of Applied Physics 1990 / 5 Vol. 29; Iss. Part 2, No

Comparison of Silica- and Alumina-Based Spin-on Sources for P-Contact Diffusion of Zinc into InGaAs

Franz, G., Amann, M.-C., Thulke, W., Weber, R., Kaumanns, R.
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L712
Date:
May, 1990
File:
PDF, 884 KB
1990
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