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Microwave Plasma Source for Ion Sources with Multipolar and Axial Magnetic Fields
Nihei, Hitoshi, Morikawa, Junji, Inoue, NobuyukiVolume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L822
Date:
May, 1990
File:
PDF, 505 KB
1990