Solid-Phase Epitaxy with X-Ray Irradiation to Grow...

Japanese Journal of Applied Physics 1991 / 2 Vol. 30; Iss. Part 2, No

Solid-Phase Epitaxy with X-Ray Irradiation to Grow Dislocation-Free Silicon Films at Low Temperatures

Sato, Fumio, Goto, Katsuyuki, Chikawa, Jun-ichi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.L205
Date:
February, 1991
File:
PDF, 327 KB
english, 1991
Conversion to is in progress
Conversion to is failed