Pulse-Field-Assisted Wafer Bonding for Silicon on Insulator

Japanese Journal of Applied Physics 1992 / 6 Vol. 31; Iss. Part 1, No

Pulse-Field-Assisted Wafer Bonding for Silicon on Insulator

Arimoto, Yoshihiro, Sugimoto, Fumitoshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.1709
Date:
June, 1992
File:
PDF, 137 KB
english, 1992
Conversion to is in progress
Conversion to is failed