Microroughness Measurements on Polished Silicon Wafers
Abe, Takao, Steigmeier, Edgar F., Hagleitner, Walter, Pidduck, Allan J.Volume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.721
Date:
March, 1992
File:
PDF, 258 KB
english, 1992