Ion Incident Angle Dependence of Ridge Shapes Formed on...

Japanese Journal of Applied Physics 1992 / 5 Vol. 31; Iss. Part 2, No

Ion Incident Angle Dependence of Ridge Shapes Formed on [111] Oriented Gd 3 Ga 5 O 12 by Ion Beam Etching

Katoh, Yujiro, Sugimoto, Naoto, Tate, Akiyuki, Shibukawa, Atsushi
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Volume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L591
Date:
May, 1992
File:
PDF, 1.15 MB
1992
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