Application of Ion-Beam-Sputtered Al Films to Ultrathin...

Japanese Journal of Applied Physics 1993 / 5 Vol. 32; Iss. Part 1, No

Application of Ion-Beam-Sputtered Al Films to Ultrathin Surface Acoustic Wave Devices

Kamijo, Atsushi, Mitsuzuka, Tsutomu, Yamamoto, Yasushi, Tomotsune, Kaoru, Tamichi, Shigeru
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.2346
Date:
May, 1993
File:
PDF, 137 KB
english, 1993
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