Thermal Diffusivity Measurement of a Thin Film in the...

Japanese Journal of Applied Physics 1993 / 8 Vol. 32; Iss. Part 1, No

Thermal Diffusivity Measurement of a Thin Film in the Direction across the Film by AC Calorimetric Method

Kato, Ryozo, Maesono, Akikazu, Hatta, Ichiro
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.3653
Date:
August, 1993
File:
PDF, 324 KB
english, 1993
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