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Novel Single-Step Rapid Thermal Oxynitridation Technology for Forming Highly Reliable Electrically Erasable Programmable Read-Only Memory Tunnel Oxide Films
Fukuda, Hisashi, Yasuda, Makoto, Iwabuchi, ToshiyukiVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.447
Date:
January, 1993
File:
PDF, 267 KB
english, 1993