Decrease in Quasi Vacancy Formation Energy in the Study of...

Decrease in Quasi Vacancy Formation Energy in the Study of Pair Diffusion Model of Group V Impurities in Silicon

Yoshida, Masayuki
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5523
Date:
December, 1993
File:
PDF, 1.84 MB
1993
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