Composition of Evaporated Boron Nitride Films by Carbon...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

Composition of Evaporated Boron Nitride Films by Carbon Dioxide and Excimer Laser

Kaneda, Kayo, Shibata, Kimihiro
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5652
Date:
December, 1993
File:
PDF, 891 KB
english, 1993
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