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Composition of Evaporated Boron Nitride Films by Carbon Dioxide and Excimer Laser
Kaneda, Kayo, Shibata, KimihiroVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5652
Date:
December, 1993
File:
PDF, 891 KB
english, 1993