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Resolution Enhancement of Hole Patterns in Sychrotron Radiation Lithography
Somemura, Yoh, Deduchi, Kimiyoshi, Miyoshi, Kazunori, Matsuda, TadahitoVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5971
Date:
December, 1993
File:
PDF, 377 KB
english, 1993