An Approach for Nanolithography Using Electron Holography

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

An Approach for Nanolithography Using Electron Holography

Ogai, Keiko, Matsui, Shinji, Kimura, Yoshihide, Shimizu, Ryuichi
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5988
Date:
December, 1993
File:
PDF, 1.01 MB
english, 1993
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