![](/img/cover-not-exists.png)
An Approach for Nanolithography Using Electron Holography
Ogai, Keiko, Matsui, Shinji, Kimura, Yoshihide, Shimizu, RyuichiVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5988
Date:
December, 1993
File:
PDF, 1.01 MB
english, 1993