Micropatterning of Quartz Substrates by...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

Micropatterning of Quartz Substrates by Multi-WavelengthVacuum-Ultraviolet Laser Ablation

Sugioka, Koji, Wada, Satoshi, Tsunemi, Akira, Sakai, Toshiaki, Takai, Hiroshi, Moriwaki, Hiroki, Nakamura, Akira, Tashiro, Hideo, Toyoda, Koichi
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.6185
Date:
December, 1993
File:
PDF, 163 KB
english, 1993
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