Photoexcited Anisotropic Etching of Single-Crystalline...

Japanese Journal of Applied Physics 1993 / 7 Vol. 32; Iss. Part 2, No

Photoexcited Anisotropic Etching of Single-Crystalline Silicon

Sakaue, Hiroyuki, Morimoto, Noboru, Horiike, Yasuhiro
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L1024
Date:
July, 1993
File:
PDF, 143 KB
english, 1993
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