Damage Formed on Silicon Surface by Helicon Wave Plasma...

Japanese Journal of Applied Physics 1993 / 4 Vol. 32; Iss. Part 2, No

Damage Formed on Silicon Surface by Helicon Wave Plasma Etching

Hara, Tohru, Kawaguchi, Kazu, Hayashi, Jun, Nogami, Hiroshi, Tsukada, Tsutomu
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L536
Date:
April, 1993
File:
PDF, 312 KB
english, 1993
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