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Damage Formed on Silicon Surface by Helicon Wave Plasma Etching
Hara, Tohru, Kawaguchi, Kazu, Hayashi, Jun, Nogami, Hiroshi, Tsukada, TsutomuVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L536
Date:
April, 1993
File:
PDF, 312 KB
english, 1993