Step Coverage, Uniformity and Composition Studies Using...

Japanese Journal of Applied Physics 1994 / 2 Vol. 33; Iss. Part 1, No

Step Coverage, Uniformity and Composition Studies Using Integrated Vapour Transport and Film-Deposition Models

Dew, Steven, Smy, Tom, Brett, Michael
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.1140
Date:
February, 1994
File:
PDF, 300 KB
english, 1994
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