Prevention of Resist Pattern Collapse by Flood Exposure...

Japanese Journal of Applied Physics 1994 / 12 Vol. 33; Iss. Part 2, No

Prevention of Resist Pattern Collapse by Flood Exposure during Rinse Process

Tanaka, Toshihiko, Morigami, Mitsuaki, Oizumi, Hiroaki, Ogawa, Taro, Uchino, Shou-ichi
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1803
Date:
December, 1994
File:
PDF, 440 KB
english, 1994
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