Effect of Stress on Oxide Edge Shape of Local Oxidation of...

Effect of Stress on Oxide Edge Shape of Local Oxidation of Silicon for Various Oxidation Temperatures

Okihara, Masao, Kuroda, Shigeki, Itoh, Masahiro, Hirashita, Norio
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.1822
Date:
April, 1995
File:
PDF, 1.10 MB
1995
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