Defects in TiN Films Probed by Monoenergetic Positron Beams

Japanese Journal of Applied Physics 1995 / 10 Vol. 34; Iss. Part 1, No

Defects in TiN Films Probed by Monoenergetic Positron Beams

Uedono, Akira, Nanao, Susumu, Tanigawa, Shoichiro, Suzuki, Ryoichi, Ohdaira, Toshiyuki, Mikado, Tomohisa, Ishibashi, Shoji
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.5711
Date:
October, 1995
File:
PDF, 1.14 MB
1995
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