New Systematic Evaluation Method for Attenuated...

Japanese Journal of Applied Physics 1995 / 12 Vol. 34; Iss. Part 1, No

New Systematic Evaluation Method for Attenuated Phase-Shifting Mask Specifications

Kagami, Ichiro, Sugawara, Minoru, Kawahira, Hiroichi, Tsudaka, Keisuke, Ishikawa, Kiichi, Nozawa, Satoru, Shimizu, Hideo, Ogawa, Tohru
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Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.6590
Date:
December, 1995
File:
PDF, 1.16 MB
english, 1995
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