Modification Effect of a - S i 1- x N x : H Surface by Hydrogen Radicals
Yamaguchi, Misako, Nagayoshi, Hiroshi, Ikeda, Makoto, Yamamoto, Yuichi, Kamisako, Koichi, Tarui, YasuoVolume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.791
Date:
February, 1995
File:
PDF, 96 KB
english, 1995