Monte Carlo Simulation for Auger Depth Profiling of...

Japanese Journal of Applied Physics 1996 / 4 Vol. 35; Iss. Part 1, No

Monte Carlo Simulation for Auger Depth Profiling of GaAs/AlAs Superlattice Structure by A r + Ion Sputtering

Lee, Hyung-Ik, Shimizu, Ryuichi, Inoue, Masahiko, Kajiwara, Kazuo, Hofmann, Siegfried
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Volume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.2271
Date:
April, 1996
File:
PDF, 319 KB
english, 1996
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