Preparation of S...

Japanese Journal of Applied Physics 1996 / 9 Vol. 35; Iss. Part 1, No

Preparation of S r T i O 3 Films on 8-Inch Wafers by Chemical Vapor Deposition

Arai, Tomoko Tsuyama, Inaishi, Yoshiaki, Sawado, Yoshinori, Kobayashi, Ichizo, Hidaka, Junichi
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Volume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.4875
Date:
September, 1996
File:
PDF, 609 KB
english, 1996
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