Nanofabrication with a Novel EB System with a Large and...

Japanese Journal of Applied Physics 1996 / 12 Vol. 35; Iss. Part 1, No

Nanofabrication with a Novel EB System with a Large and Stable Beam Current

Yoshimura, Toshiyuki, Ohta, Hiroya, Yamamoto, Jiro, Uchino, Shou-ichi, Gotoh, Yasushi, Terasawa, Tsuneo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.6421
Date:
December, 1996
File:
PDF, 200 KB
1996
Conversion to is in progress
Conversion to is failed