Fabrication of an Integrated Silicon-Based Lens for...

Japanese Journal of Applied Physics 1996 / 12 Vol. 35; Iss. Part 1, No

Fabrication of an Integrated Silicon-Based Lens for Low-Energy Miniaturized Electron Columns

Despont, Michel, Beljakovic, Gilles, Stebler, Camille, Staufer, Urs, Vettiger, Peter, Rooij, Nico-F. de
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Volume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.6641
Date:
December, 1996
File:
PDF, 256 KB
english, 1996
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