Compact Electron Cyclotron Resonance Plasma Source...

Japanese Journal of Applied Physics 1997 / 7 Vol. 36; Iss. Part 1, No

Compact Electron Cyclotron Resonance Plasma Source Optimization for Ion Beam Applications

O'Keeffe, Patrick, Yamakawa, Kouji, Mutoh, Harunobu, Den, Shoji, Hayashi, Yuzo
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4576
Date:
July, 1997
File:
PDF, 246 KB
english, 1997
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