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Structural properties of fluorinated SiO2 thin films
Fabio Iacona, Giuseppina Casella, Francesco La Via, Salvatore Lombardo, Vito Raineri, Giuseppe SpotoVolume:
50
Year:
2000
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(99)00266-x
File:
PDF, 115 KB
english, 2000