Detailed Structure of the Afterglow of Radio-Frequency Chlorine Discharge
Nanbu, Kenichi, Nakagome, Takeo, Kageyama, JunichiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.L951
Date:
August, 1999
File:
PDF, 321 KB
english, 1999